HIGH FREQUENCY POWER SUPPLY DEVICE

To provide a high-frequency power supply device with which it is possible to reduce reflected wave electric power attributable to an IMD.SOLUTION: A high-frequency power supply device according to the present disclosure comprises: a first power supply that outputs a high-frequency voltage having a first fundamental frequency toward a load; a second power supply that outputs a negative polarity voltage having a second fundamental frequency lower than the first fundamental frequency toward the load; a matching unit that is connected between the first power supply and the load and is capable of matching an impedance on the first power supply side with an impedance on the load side; and a low-pass filter that is connected between the second power supply and the load. The first power supply exercises frequency modulation control to modulate the high-frequency voltage with a trapezoidal wave-like modulating signal having the same frequency as the second fundamental frequency and output the modulated high-frequency voltage as a modulated wave.SELECTED DRAWING: Figure 2 【課題】本開示は、ＩＭＤに起因する反射波電力を低減できる高周波電源装置を提供する。【解決手段】本開示に係る高周波電源装置は、第１の基本周波数を有する高周波電圧を負荷に向けて出力する第１の電源と、前記第１の基本周波数より低い第２の基本周波数を有する負極性電圧を前記負荷に向けて出力する第２の電源と、前記第１の電源と前記負荷との間に接続され、前記第１の電源側のインピーダンスと前記負荷側のインピーダンスとを整合可能である整合部と、前記第２の電源と前記負荷との間に接続されたローパスフィルタとを備え、前記第１の電源は、前記高周波電圧を前記第２の基本周波数と同じ周波数を有する台形波状の変調信号で周波数変調させ変調波として出力する周波数変調制御を行う。【選択図】図２