PROCESSING DEVICE

To suppress processed waste such as ground waste from remaining in cylindrical bellows.SOLUTION: Cylindrical bellows 90 provided to surround an insertion hole 82 of a processing chamber 80 and a spindle 72 have one ring-shaped fold line 93, which expands and contracts in a vertical direction, by fol...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	IKEDA SOJI, KAKINUMA YOSHINORI, TANIMOTO RYOJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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