RIDGE-TYPE SEMICONDUCTOR OPTICAL DEVICE
To prevent damage to a mesa stripe structure.SOLUTION: A ridge-type semiconductor optical device includes: a substrate 10; a mesa stripe structure 24 which extends in a first direction D1 on the substrate 10 and comprises a brittle material; an electrode pattern 32 including a ridge electrode 34 on...
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Zusammenfassung: | To prevent damage to a mesa stripe structure.SOLUTION: A ridge-type semiconductor optical device includes: a substrate 10; a mesa stripe structure 24 which extends in a first direction D1 on the substrate 10 and comprises a brittle material; an electrode pattern 32 including a ridge electrode 34 on the mesa stripe structure 24; a pair of projection structures 28 on the substrate 10 and on both sides of the mesa stripe structure 24 in a second direction D2 perpendicular to the first direction D1; and a protection film 44 which is separated from the electrode pattern 32 and comprises a ductile material, the protection film being on each of the pair of projection structures 28. The protection film 44 and a corresponding one of the pair of projection structures 28 are aligned at edges toward at least one orientation along the first direction D1, and the protection film 44 has a top higher from the substrate 10 than a top of the ridge electrode 34.SELECTED DRAWING: Figure 1
【課題】メサストライプ構造へのダメージを防ぐことを目的とする。【解決手段】リッジ型半導体光素子は、基板10と、基板10の上にあって第1方向D1に延び、脆性材料からなるメサストライプ構造24と、メサストライプ構造24の上にあるリッジ電極34を含む電極パターン32と、基板10の上で、第1方向D1に直交する第2方向D2に、メサストライプ構造24の両側にある一対の凸構造28と、電極パターン32から分離され、延性材料からなり、一対の凸構造28のそれぞれの上にある保護膜44と、を有し、保護膜44および一対の凸構造28の対応する1つは、第1方向D1に沿った少なくとも一方側の先端同士で揃い、保護膜44の上面は、リッジ電極34の上面よりも、基板10からの高さにおいて高い。【選択図】図1 |
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