MAGNETIC MEMORY AND MANUFACTURING METHOD THEREOF
To provide a magnetic memory including a yoke structure with excellent miniaturization.SOLUTION: A magnetic memory comprises a plurality of cylindrical first magnetic members extending along a first direction and including a first end part and a second end part. A first wiring is arranged separated...
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Zusammenfassung: | To provide a magnetic memory including a yoke structure with excellent miniaturization.SOLUTION: A magnetic memory comprises a plurality of cylindrical first magnetic members extending along a first direction and including a first end part and a second end part. A first wiring is arranged separated from the first magnetic member on the second end part side of the first magnetic member, extends in a second direction, and is arranged adjacently in a third direction. In a plan view viewed from the first direction, the first magnetic member is located between adjacent first wirings. A first portion of a second magnetic member is provided above the first wiring. A second portion of the second magnetic member extends in the second direction between adjacent first wirings, and is electrically connected to the first portion. A third portion of the second magnetic member is provided below the plurality of first wirings. At least a part of a fourth portion of the second magnetic member is provided inside the second end part of the first magnetic member, and the fourth potion is electrically connected to the second portion. A third wiring is provided on the first end part side of the first magnetic member, and extends along the third direction.SELECTED DRAWING: Figure 6
【課題】微細化に優れたヨーク構造を有する磁気メモリの提供。【解決手段】磁気メモリは第1方向に沿って延び第1端部および第2端部を有する筒状の複数の第1磁性部材を備える。第1配線は、第1磁性部材の第2端部側に第1磁性部材から離間して配置され、第2方向に延び、第3方向に隣り合って配置される。第1方向から見た平面視では、隣り合う第1配線間に第1磁性部材が位置する。第2磁性部材の第1部分は第1配線の上方に設けられる。第2磁性部材の第2部分は隣り合う第1配線間において第2方向に延びており、第1部分と電気的に接続される。第2磁性部材の第3部分は複数の第1配線の下方に設けられる。第2磁性部材の第4部分は第1磁性部材の第2端部の内側に少なくとも一部が設けられ、第2部分と電気的に接続される。第3配線は第1磁性部材の第1端部側に設けられ、第3方向に沿って延びている。【選択図】図6 |
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