INSPECTION DEVICE

To provide an inspection device that can improve the detection accuracy of a characteristic of an MRAM element.SOLUTION: An inspection device 1 includes: a stage 10 that has a magnetoresistive memory element fixed on a stage surface 13; a plurality of electromagnets 20 that generate a first magnetic field in which a direction of a magnetic field component in a vertical direction perpendicular to the stage surface 13 changes from a first direction to a second direction depending on a position on the stage surface 13 and a second magnetic field in which a direction of the magnetic field component in an in-plane direction parallel to the stage surface 13 changes from a third direction to a fourth direction depending on the position on the stage surface 13; an optical system 30 that irradiates the magnetoresistive memory element with illumination light including polarized light and condenses reflection light of the illumination light reflected by the magnetoresistive memory element; and a detector 40 that detects the reflection light in a case where a position of the magnetoresistive memory element in the first magnetic field is changed and the reflection light in a case where the position of the magnetoresistive memory element in the second magnetic field is changed.SELECTED DRAWING: Figure 1 【課題】ＭＲＡＭ素子の特性の検出精度を向上させることができる検査装置を提供する。【解決手段】検査装置１は、ステージ面１３上に磁気抵抗メモリ素子を固定させたステージ１０と、ステージ面１３に垂直な垂直方向の磁場成分の向きがステージ面１３上の位置によって第１向きから第２向きに変化する第１磁場、及び、ステージ面１３に平行な面内方向の磁場成分の向きがステージ面１３上の位置によって第３向きから第４向きに変化する第２磁場を発生させる複数の電磁石２０と、偏光を含む照明光で磁気抵抗メモリ素子を照明するとともに、照明光が磁気抵抗メモリ素子で反射した反射光を集光する光学系３０と、第１磁場内における磁気抵抗メモリ素子の位置を変化させた場合の反射光、及び、第２磁場内における磁気抵抗メモリ素子の位置を変化させた場合の反射光を検出する検出器４０と、を備える。【選択図】図１