FUNCTIONAL LAYER FORMATION DEVICE, ELECTRONIC COMPONENT MANUFACTURING DEVICE, ELECTRODE MANUFACTURING DEVICE AND FUNCTIONAL LAYER FORMATION METHOD

To provide a functional layer formation device capable of forming a functional layer with excellent quality.SOLUTION: A functional layer formation device according to one aspect of the present invention includes: discharge means which discharges functional layer precursor fluid through multiple nozzles onto a surface of an object; first movement means which relatively moves the discharge means and the object in the first direction; and control means which controls the operations of the discharge means and the first movement means. In the discharge means, a nozzle surface with the multiple nozzles is arranged so as to be inclined with respect to the first direction. The control means performs control so as to form the contour of the functional layer by the functional layer precursor fluid discharged from the nozzle which is arranged at a position relatively close to the surface of the object due to the inclination of the nozzle surface among the multiple nozzles.SELECTED DRAWING: Figure 1 【課題】品質に優れた機能層を形成可能な機能層形成装置を提供すること。【解決手段】本発明の一態様に係る機能層形成装置は、複数のノズルから対象物の表面に機能層前駆体液を吐出する吐出手段と、前記吐出手段と前記対象物とを第１方向に相対移動させる第１移動手段と、前記吐出手段および前記第１移動手段それぞれの動作を制御する制御手段と、を有し、前記吐出手段は、前記複数のノズルを有するノズル面が前記第１方向に対して傾いて配置され、前記制御手段は、前記複数のノズルのうち、前記ノズル面の傾きによって前記対象物の表面に相対的に近い位置に配置される前記ノズルから吐出した前記機能層前駆体液により、機能層の輪郭を形成するように制御する。【選択図】図１