SEMICONDUCTOR DEVICE
To prevent carriers from flowing from a diode region to an IGBT region during diode recovery, causing carrier concentration at a boundary and destroying an element.SOLUTION: A semiconductor device having an IGBT region 4, a diode region 5, and a wiring region 6 in the same chip includes: a wiring re...
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Zusammenfassung: | To prevent carriers from flowing from a diode region to an IGBT region during diode recovery, causing carrier concentration at a boundary and destroying an element.SOLUTION: A semiconductor device having an IGBT region 4, a diode region 5, and a wiring region 6 in the same chip includes: a wiring region 6 which includes a gate runner 7 that supplies a gate potential to a trench gate electrode 20, a well layer 28 in which an impurity diffusion depth is deeper than that of the trench 19, and a plurality of first contact regions 33 that electrically connects the well layer 28 and an emitter electrode 21, where an area of the first contact region 33 in the vicinity 10 of the boundary close to a boundary 9 between the IGBT region 4 and the diode region 5 is larger than an area of the first contact region 33 located farther from the vicinity of the boundary 10.SELECTED DRAWING: Figure 2
【課題】ダイオードのリカバリ時にダイオード領域からIGBT領域へキャリア流れ込んで境界部にキャリアが集中して素子が破壊されることを抑制する。【解決手段】同一チップ内にIGBT領域4とダイオード領域5と配線領域6とを有する半導体装置において、配線領域6は、トレンチゲート電極20にゲート電位を供給するゲートランナ7と、トレンチ19よりも不純物の拡散深さが深いウェル層28と、ウェル層28とエミッタ電極21とを電気的に接続する複数の第1のコンタクト領域33とを有し、IGBT領域4とダイオード領域5との境界部9に近い境界部近傍10の第1のコンタクト領域33の面積は、境界部近傍10よりも遠い位置の第1のコンタクト領域33の面積よりも大きい。【選択図】図2 |
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