METHOD OF EVALUATING SAMPLE USING CHARGED PARTICLE MICROSCOPY

To provide a method of evaluating a sample using charged particle microscopy, which involves steps where the sample contains primary particles of interest.SOLUTION: A method comprises imaging a sample using a charged particle microscope to obtain at least one image of primary particles, and determin...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: THIJS M J BRESSERS, LAURE KAIRAWICZ, DANIEL NEMECEK, SEBASTIAN UNGER, STEVEN MILIAN, HAROLD PHELIPPEAU
Format: Patent
Sprache:eng ; jpn
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:To provide a method of evaluating a sample using charged particle microscopy, which involves steps where the sample contains primary particles of interest.SOLUTION: A method comprises imaging a sample using a charged particle microscope to obtain at least one image of primary particles, and determining the concentration of the primary particles P1 using the at least one image. The sample also contains secondary particles that are independent from the primary particles and are present in the at least one image. The method further comprises providing a known concentration of the secondary particles, and using the known concentration of the secondary particles in the step of determining the concentration of the primary particles.SELECTED DRAWING: Figure 4 【課題】荷電粒子顕微鏡法を使用して試料を評価する方法であって、試料が対象の一次粒子を含むステップを含む方法を提供する。【解決手段】一次粒子の少なくとも1つの画像を得るために荷電粒子顕微鏡を使用して試料を撮像するステップと、少なくとも1つの画像を使用して一次粒子P1の濃度を決定するステップとを含む。試料は、一次粒子から独立し、少なくとも1つの画像内に存在する二次粒子を更に含む。二次粒子の既知の濃度を提供するステップと、一次粒子の濃度を決定するステップにおいて二次粒子の既知の濃度を使用するステップとをさらに含む。【選択図】図4