CHARGED PARTICLE ASSESSMENT TOOL AND INSPECTION METHOD

To provide a charged-particle assessment tool comprising: a condenser lens array; a collimator; a plurality of objective lenses; and an electric power source.SOLUTION: The condenser lens array is configured to divide a beam of charged particles into a plurality of sub-beams and to focus each of the...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MARCO JAN-JACO WIELAND
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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