LASER DIODE AND METHOD OF MANUFACTURING THE SAME
To provide a laser diode.SOLUTION: A laser diode comprises: an electronic substrate having a substrate thermal expansion coefficient; an epitaxial structure which is formed in the electronic substrate; and a composite multilayer metal plate which is provided below the electronic substrate, is provid...
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Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a laser diode.SOLUTION: A laser diode comprises: an electronic substrate having a substrate thermal expansion coefficient; an epitaxial structure which is formed in the electronic substrate; and a composite multilayer metal plate which is provided below the electronic substrate, is provided in the state of overlapping each other, includes first and second metal layers being different in material, and has a modulated thermal expansion coefficient. The electronic substrate, which has an initial thickness when the epitaxial structure is grown, is coupled to the composite multilayer metal plate after it is thin-walled to a coupling thickness. The modulated thermal expansion coefficient of the composite multilayer metal plate and the substrate thermal expansion coefficient are approximate to each other. Thus, the heat radiation capacity and light emission efficiency of the laser diode can be increased.SELECTED DRAWING: Figure 1
【課題】レーザーダイオードを提供する。【解決手段】基板熱膨張率を有する原始基板と、原始基板に形成されるエピタキシャル構造と、原始基板の下方に設けられ且つ少なくとも、互いに重ねて設けられ且つ材質が異なる第1の金属層及び第2の金属層を含み、変調熱膨張率を有する複合多層金属プレートと、を備え、原始基板は、エピタキシャル構造を成長させる場合に初期厚さを有し、結合厚さまで薄肉化されてから複合多層金属プレートに結合され、且つ複合多層金属プレートの変調熱膨張率と基板熱膨張率とが近いレーザーダイオード。これにより、レーザーダイオードの放熱能力及び出光効率を向上させることができる。【選択図】図1 |
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