METHOD FOR PRODUCING GALLIUM NITRIDE
To provide a method for producing gallium nitride by which unreacted metallic gallium hardly remains.SOLUTION: A method for producing gallium nitride comprises a step of bubbling an ammonia-containing gas in liquid metallic gallium and heating at 1000 to 1200°C for 3 hours or longer for reaction.SEL...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a method for producing gallium nitride by which unreacted metallic gallium hardly remains.SOLUTION: A method for producing gallium nitride comprises a step of bubbling an ammonia-containing gas in liquid metallic gallium and heating at 1000 to 1200°C for 3 hours or longer for reaction.SELECTED DRAWING: None
【課題】未反応の金属ガリウムが残存し難い窒化ガリウムの製造方法を提供すること。【解決手段】液体金属ガリウム中にアンモニア含有ガスをバブリングしながら、1000~1200℃にて3時間以上加熱して反応させる工程を含む、窒化ガリウムの製造方法。【選択図】なし |
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