METHOD FOR PRODUCING GALLIUM NITRIDE

To provide a method for producing gallium nitride by which unreacted metallic gallium hardly remains.SOLUTION: A method for producing gallium nitride comprises a step of bubbling an ammonia-containing gas in liquid metallic gallium and heating at 1000 to 1200°C for 3 hours or longer for reaction.SEL...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HORIGUCHI KAORI, SUZUKI MASAHARU, MIYAWAKI MOE, MASUDA KENTA
Format: Patent
Sprache:eng ; jpn
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:To provide a method for producing gallium nitride by which unreacted metallic gallium hardly remains.SOLUTION: A method for producing gallium nitride comprises a step of bubbling an ammonia-containing gas in liquid metallic gallium and heating at 1000 to 1200°C for 3 hours or longer for reaction.SELECTED DRAWING: None 【課題】未反応の金属ガリウムが残存し難い窒化ガリウムの製造方法を提供すること。【解決手段】液体金属ガリウム中にアンモニア含有ガスをバブリングしながら、1000~1200℃にて3時間以上加熱して反応させる工程を含む、窒化ガリウムの製造方法。【選択図】なし