SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

To provide a substrate and a method for manufacturing the same that do not increase an area of pad sections located below and above via holes while decreasing a width of the via holes.SOLUTION: A substrate according to the present invention has a first insulating layer IL, a second insulating layer...

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Bibliographische Detailangaben
Hauptverfasser: KO CHAN HOON, LEE CHULMIN, KIM SANGHOON, OH INHWAN, BAE SOHYUN, LIM KYOUNGHEE
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide a substrate and a method for manufacturing the same that do not increase an area of pad sections located below and above via holes while decreasing a width of the via holes.SOLUTION: A substrate according to the present invention has a first insulating layer IL, a second insulating layer PL located on the first insulating layer IL, and a via hole HL including a lower hole Ha formed in the first insulating layer IL and an upper hole Hb formed in the second insulating layer PL and connected to the lower hole Ha. An upper width W2 of the lower hole Ha is larger than a lower width W1 of the lower hole Ha, and an upper width W3 of the upper hole Hb is smaller than a lower width W3 of the upper hole Hb.SELECTED DRAWING: Figure 1 【課題】ビアホールの幅を減少させながらも、ビアホールの下部及び上部に位置するパッド部の面積を増加させない基板及びその製造方法を提供する。【解決手段】本発明の基板は、第1絶縁層ILと、第1絶縁層IL上に位置する第2絶縁層PLと、第1絶縁層ILに形成された下部ホールHa及び第2絶縁層PLに形成されて下部ホールHaに連結された上部ホールHbを含むビアホールHLと、を備える。下部ホールHaの上部幅W2は、下部ホールHaの下部幅W1よりも大きく、上部ホールHbの上部幅W3は、上部ホールHbの下部幅W3よりも小さい。【選択図】図1