IMAGING APPARATUS, INSPECTION DEVICE USING THE IMAGING APPARATUS, AND IMAGING METHOD

To provide an imaging apparatus that can obtain a tomographic image having resolution in a depth direction of an object to be measured, an inspection device using the imaging apparatus, and an imaging method.SOLUTION: An imaging apparatus comprises: a light source 20 that irradiates an object to be measured W with emission light in a wavelength region that can transmit through the object to be measured W at a fixed incident angle; an imaging optical system 31 that acquires reflected light from the object to be measured W irradiated with the emission light from the light source 20; a light receiver 32 that photoelectrically converts the reflected light acquired by the imaging optical system 31 with a plurality of pixels to continuously generate image data of the object to be measured W; a partial image creation unit 62 that extracts data of specific pixels from a plurality of pieces of image data generated by the light receiver 32 to create partial images composed of the data of the specific pixels; and a tomographic image creation unit 63 that combines the plurality of partial images to create a tomographic image at a depth corresponding to the specific pixels. The object to be measured W, light source 20, imaging optical system 31, and light receiver 32 move relative to each other.SELECTED DRAWING: Figure 1 【課題】被測定物の深さ方向に分解能を持った断層画像を得ることができる撮像装置、当該撮像装置を用いた検査装置、及び撮像方法を提供する。【解決手段】被測定物Ｗを透過可能な波長域の出射光を被測定物Ｗに対して一定の入射角で照射する光源２０と、光源２０からの出射光が照射された被測定物Ｗからの反射光を取得する結像光学系３１と、結像光学系３１により取得された反射光を複数の画素で光電変換して、被測定物Ｗの画像データを連続的に生成する受光器３２と、受光器３２により生成された複数の画像データから特定の画素のデータを抽出して、特定の画素のデータからなる部分画像を生成する部分画像生成部６２と、複数の部分画像を合成し、特定の画素に対応する深さの断層画像を生成する断層画像生成部６３と、を備え、被測定物Ｗと、光源２０、結合光学系３１、及び受光器３２とは相対移動する。【選択図】図１