INTEGRATED CIRCUIT ELEMENT
To provide an integrated circuit element including a back side contact structure whose degree of integration and reliability are improved.SOLUTION: An integrated circuit element 100 includes a fin type active region F1 including a first fin part F1A and a second fin part F2A separated from each othe...
Gespeichert in:
Hauptverfasser: | , , , , |
---|---|
Format: | Patent |
Sprache: | eng ; jpn |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!