INTEGRATED CIRCUIT ELEMENT

To provide an integrated circuit element including a back side contact structure whose degree of integration and reliability are improved.SOLUTION: An integrated circuit element 100 includes a fin type active region F1 including a first fin part F1A and a second fin part F2A separated from each othe...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHO EUNHO, KIM BOMI, LIM SEUNG HYUN, KIM HEESUB, JO GUNHO
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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