DISPLAY DEVICE
To improve luminance of a display device.SOLUTION: A display device comprises: a first nitride insulating film provided on a first substrate; a gate electrode provided on the first nitride insulating film; a second nitride insulating film provided on the gate electrode; a first oxide insulating film...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To improve luminance of a display device.SOLUTION: A display device comprises: a first nitride insulating film provided on a first substrate; a gate electrode provided on the first nitride insulating film; a second nitride insulating film provided on the gate electrode; a first oxide insulating film provided on the second nitride insulating film; and an oxide semiconductor layer provided on the first oxide insulating film. The gate electrode is formed by successively laminating a first titanium layer, an aluminum layer and a second titanium layer in this order from a first nitride insulating film side, and the thickness of the second titanium layer is larger than thickness of the first titanium layer.SELECTED DRAWING: Figure 4
【課題】表示装置の輝度を向上させる。【解決手段】表示装置は、第1基板の上に設けられた第1窒化絶縁膜と、第1窒化絶縁膜の上に設けられたゲート電極と、ゲート電極の上に設けられた第2窒化絶縁膜と、第2窒化絶縁膜の上に設けられた第1酸化絶縁膜と、第1酸化絶縁膜の上に設けられた酸化物半導体層と、を含み、ゲート電極は、第1チタン層、アルミニウム層、及び第2チタン層が第1窒化絶縁膜側から順に積層されており、第2チタン層の膜厚は、第1チタン層の膜厚より大きい。【選択図】図4 |
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