RAW MATERIAL SUPPLY DEVICE AND LIGHT SOURCE DEVICE

To provide a raw material supply device capable of stably supplying a plasma raw material and a light source device.SOLUTION: A raw material feeder according to one embodiment of the present invention is a raw material supply device that supplies a plasma raw material that is turned into plasma and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ASHIZAWA NORITAKA, YABUTA YASUNOBU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS X-RAY TECHNIQUE
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!