RAW MATERIAL SUPPLY DEVICE AND LIGHT SOURCE DEVICE

To provide a raw material supply device capable of stably supplying a plasma raw material and a light source device.SOLUTION: A raw material feeder according to one embodiment of the present invention is a raw material supply device that supplies a plasma raw material that is turned into plasma and generates radiation by irradiation with an energy beam into a reduced pressure chamber, and includes a raw material tank and a supply control section. The raw material tank holds the plasma raw material in a liquid state. The supply control unit has a supply pipe that connects the raw material tank and the reduced pressure chamber and supplies the liquid plasma raw material held in the raw material tank to a storage container provided in the reduced pressure chamber to controlling the supply of the liquid plasma raw material through the supply pipe.SELECTED DRAWING: Figure 2 【課題】プラズマ原料を安定して供給することが可能な原料供給装置及び光源装置を提供すること。【解決手段】本発明の一形態に係る原料供給装置は、エネルギービームの照射によりプラズマ化して放射線を発生するプラズマ原料を減圧チャンバ内に供給する原料供給装置であって、原料タンクと、供給制御部とを具備する。前記原料タンクは、前記プラズマ原料を液体状態で保持する。前記供給制御部は、前記原料タンクと前記減圧チャンバとを接続し前記原料タンク内に保持された液体状のプラズマ原料を前記減圧チャンバ内に設けられた貯留容器に供給する供給管を有し、前記供給管を通した前記液体状のプラズマ原料の供給を制御する。【選択図】図２