CARRIER PAD
To provide a carrier pad that stably suctions and holds a workpiece and a chip and facilitates peeling.SOLUTION: A carrier pad 1 has a holding surface 2 that holds a workpiece or a chip, and the holding surface 2 is formed with a suction hole 3 that is made of an elastic member and sucks the workpie...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; jpn |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | To provide a carrier pad that stably suctions and holds a workpiece and a chip and facilitates peeling.SOLUTION: A carrier pad 1 has a holding surface 2 that holds a workpiece or a chip, and the holding surface 2 is formed with a suction hole 3 that is made of an elastic member and sucks the workpiece or the chip and unevenness. The carrier pad 1 is used, for example, by being attached to the lower surface of a transport portion 11 of a transport device. The unevenness is formed by a plurality of grooves 4, for example. The unevenness deforms and collapses a little when the workpiece or the pad is suctioned and held.SELECTED DRAWING: Figure 3
【課題】ワークやチップを安定して吸引保持し、かつ剥離を容易にする搬送パッドを提供する事。【解決手段】搬送パッド１は、ワークやチップを保持する保持面２を有し、保持面２は、弾性部材で構成され、ワークやチップを吸引する吸引孔３と、凹凸と、が形成されている事を特徴とする。搬送パッド１は、例えば、搬送装置の搬送部１１の下面に装着されて使用される。凹凸は、例えば、複数の溝４により形成される。凹凸は、ワークやパッドを吸引保持する際に、変形して少し潰れる。【選択図】図３ |
|---|