MEASURING DEVICE
To provide a measuring device which can suppress the leakage amount when guiding multiple wavelength light output from a light source and can increase the amount of light guidance.SOLUTION: The measurement device includes: a light guiding path including a taper light fiber in which a light reception...
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Zusammenfassung: | To provide a measuring device which can suppress the leakage amount when guiding multiple wavelength light output from a light source and can increase the amount of light guidance.SOLUTION: The measurement device includes: a light guiding path including a taper light fiber in which a light reception area is larger on an incidence end side than on a light exit side, the light guiding path drawing in multiple wavelength light output from the light source from the incidence end side; a probe for causing the multiple wavelength light guided through the light guiding path to focus on a plurality of positions on an optical path and receiving reflection light from the multiple wavelength light from a measurement target object on the optical axis; and a spectroscope for detecting a component focused on the surface of the measurement target object and reflected of the multiple wavelength light, from the reflection light.SELECTED DRAWING: Figure 2
【課題】 光源から出力される多波長光を導光するときの漏れ量を抑制し、導光量を増加させることが可能な測定装置を提供する。【解決手段】 測定装置は、入射端側の受光面積が出射端側よりも大きいテーパ光ファイバを含み、光源から出力された多波長光を入射端側から取り込んで導光する導光路と、導光路を通じて導光される多波長光を光軸上の複数の位置で合焦させ、光軸上の測定対象物からの多波長光の反射光を受光するプローブと、反射光から、多波長光のうち測定対象物の表面で合焦して反射された成分を検出する分光器とを備える。【選択図】 図2 |
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