METHOD FOR MANUFACTURING MEMBER INCLUDING GAS FLOW PASSAGE AND MEMBER INCLUDING GAS FLOW PASSAGE

To provide a method for manufacturing a member including a gas passage that can readily manufacture a member including a gas passage while maintaining high corrosion resistance of a surface of the gas passage, and to provide a member including a gas passage.SOLUTION: A method for manufacturing a mem...

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Bibliographische Detailangaben
Hauptverfasser:	TORIYA DAISUKE, YAMANAKA TAKESHI, OKURA NARIYUKI, TERADA HIROTO, SHIONO KAI, SATO RINTARO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	To provide a method for manufacturing a member including a gas passage that can readily manufacture a member including a gas passage while maintaining high corrosion resistance of a surface of the gas passage, and to provide a member including a gas passage.SOLUTION: A method for manufacturing a member including a gas passage includes the steps of: providing a metal material in which a gas passage is formed; and forming a corrosion resistant film at an inner surface of the gas passageway with ALD.SELECTED DRAWING: Figure 5 【課題】ガス流路の表面の耐食性を高く維持しつつ簡易に製造することができる、ガス流路を有する部材の製造方法、およびガス流路を有する部材を提供する。【解決手段】ガス流路を有する部材の製造方法は、内部にガス流路が形成された金属素材を準備する工程と、ＡＬＤによりガス流路の内面に耐食性膜を形成する工程とを有する。【選択図】図５