EXPANSION METHOD AND EXPANSION DEVICE

To provide an expansion method and an expansion device that can prevent contact between chips while preventing gas generated by heating an expansion sheet from adhering to a workpiece.SOLUTION: An expansion method includes: a frame fixing step 301 of fixing a frame of a work unit with a frame fixing...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SATO KAZUTERU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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