SUBSTRATE PROCESSING APPARATUS

To provide a technology that can increase the amount of cassettes stored without increasing the size of a transport device.SOLUTION: A substrate processing apparatus according to an aspect of the present disclosure includes a loading/unloading portion having a first side surface through which a container containing a substrate is loaded/unloaded, and a second side surface opposite to the first side surface, a substrate transport portion extending along a first direction orthogonal to the second side surface, and a plurality of batch processing portions adjacent to each other along the longitudinal direction of the substrate transport portion, and the loading/unloading portion includes a first transport device and a second transport device capable of transporting the container, a first area accessible by the first transport device and including a plurality of first storage shelves for storing the containers, a second area accessible by the second transport device and including a plurality of second storage shelves for storing the containers, and a movable shelf movable between the first area and the second area.SELECTED DRAWING: Figure 5 【課題】搬送装置を大型化することなく、カセットの保管量を増やすことができる技術を提供する。【解決手段】本開示の一態様による基板処理装置は、基板を収容した容器が搬入出される第１側面と、前記第１側面と反対側の第２側面とを有する搬入出部と、前記第２側面と直交する第１方向に沿って延びる基板搬送部と、前記基板搬送部の長手方向に沿って隣接する複数のバッチ処理部と、を備え、前記搬入出部は、前記容器を搬送可能な第１搬送装置及び第２搬送装置と、前記第１搬送装置がアクセス可能であり、前記容器を保管する複数の第１保管棚を含む第１領域と、前記第２搬送装置がアクセス可能であり、前記容器を保管する複数の第２保管棚を含む第２領域と、前記第１領域と前記第２領域との間で移動可能な可動棚と、を有する。【選択図】図５