DECONTAMINATION LIQUID AND DECONTAMINATION DEVICE AND METHOD USING THE SAME

To provide decontamination liquid which prevents electrification of mist for decontamination, in decontaminating an interior part of a work chamber of an isolator or the like using mist for decontamination formed of peroxide, and prevents a wall surface of the interior part of the work chamber being...

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Hauptverfasser: KITANO TSUKASA, OSHIMA MITSUTOSHI, KAWASAKI YASUSHI, OKUMURA SUZUNE, GUO ZHIQIANG, AOI KEITO, UKIURA AYUMI, OGATA YOSHITAKA, KUREBAYASHI KOHEI, NIMURA HARUKA, ITO NARUMI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide decontamination liquid which prevents electrification of mist for decontamination, in decontaminating an interior part of a work chamber of an isolator or the like using mist for decontamination formed of peroxide, and prevents a wall surface of the interior part of the work chamber being a decontamination object from excessively getting wet and prevents dripping, and a decontamination device and method using the same.SOLUTION: Decontamination liquid is formed of a hydrogen peroxide solution in which a substance for increasing electric conductivity of a solution is dissolved, the substance is preferably an electrolyte, and more preferably, the substance is an inorganic salt or organic acid. In addition, a value of the electric conductivity of the decontamination liquid is preferably 14 μS/cm or more. In addition, a vaporization residue of the decontamination liquid is 30 ppm or lower, preferably. The decontamination device and method release the decontamination liquid into a decontamination object chamber, as mist for decontamination, for decontamination of the inside of the decontamination object chamber.SELECTED DRAWING: Figure 1 【課題】アイソレーターなどの作業室の内部を過酸化水素からなる除染用ミストを用いて除染する際に、除染用ミストの帯電を防止し、除染対象である作業室の内部の壁面への過剰な濡れや液垂れを防止することのできる除染液、並びに、これを使用する除染装置及び除染方法を提供する。【解決手段】除染液は、水溶液の電気伝導度を増加させる物質を溶解した過酸化水素水からなる。この物質は、電解質であることが好ましく、無機塩又は有機酸であることがより好ましい。また、この除染液の電気伝導度の値が14μS/cm以上であることが好ましい。また、除染液の蒸発残分が30ppm以下であることが好ましい。また、除染装置及び除染方法は、この除染液を除染用ミストとして除染対象室の内部に放出して、当該除染対象室の内部を除染する。【選択図】図1