STAGE
To provide a stage capable of implementing a temperature gradient profile of a big temperature difference between an inner region and an outer region.SOLUTION: A stage includes: a first metal plate; a second metal plate which is positioned at a lower side of the first metal plate; a heat insulation...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a stage capable of implementing a temperature gradient profile of a big temperature difference between an inner region and an outer region.SOLUTION: A stage includes: a first metal plate; a second metal plate which is positioned at a lower side of the first metal plate; a heat insulation part including a first space provided in the first metal plate and a second space provided in the second metal plate; and a reflux path and a heater which are disposed while holding the heat insulation part therebetween. In a cross-sectional view, a width of the heat insulation part in the first metal plate is different from a width of the heat insulation part in the second metal plate.SELECTED DRAWING: Figure 3
【課題】内側領域と外側領域との温度差の大きい温度勾配プロファイルを実現することができるステージを提供すること。【解決手段】ステージは、第１の金属プレートと、第１の金属プレートの下方に位置する第２の金属プレートと、第１の金属プレート内に設けられた第１の空間と第２の金属プレート内に設けられた第２の空間とを含む断熱部と、断熱部を間に挟んで配置される環流路およびヒータと、を含み、断面視において、第１の金属プレートにおける断熱部の幅は、第２の金属プレートにおける断熱部の幅と異なる。【選択図】図３ |
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