MULTI-BEAM IMAGE GENERATING APPARATUS AND MULTI-BEAM IMAGE GENERATION METHOD
To provide a multi-beam image generating apparatus and an image generation method capable of moving a sample while irradiating the sample with a plurality of primary electron beam, detecting each image by a detection deice by separating a plurality of secondary electron beams with a beam splitter an...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng ; jpn |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | To provide a multi-beam image generating apparatus and an image generation method capable of moving a sample while irradiating the sample with a plurality of primary electron beam, detecting each image by a detection deice by separating a plurality of secondary electron beams with a beam splitter and synthesizing each image into one image, and performing image acquisition at high speed.SOLUTION: A multi-beam image generating apparatus comprises a plurality of beam generation devices, a beam splitter, an objective lens, a deflection system, a projection lens, a stage, and an interferometer. A plurality of primary electron beams is entered to a shaft of the objective lens by the beam splitter to irradiate the sample with each primary electron beam slenderly narrowed by the objective lens and is scanned by the deflection system. A secondary electron discharged from the sample is entered to the shaft of the projection lens by the beam splitter, and an image of the plurality of electron beams is output by imaging the image to a detection device with the projection lens. The multi-beam image generating apparatus is constructed so as to perform correction of a position of the sample output from image information and an interferometer in a real time movement direction, a movement amount of a stage based on the position in a perpendicular direction, and a rotational amount.SELECTED DRAWING: Figure 1
【課題】マルチビーム画像生成装置および画像生成方法に関し、複数の1次電子ビームをサンプルに照射しつつサンプルを移動させ、複数の2次電子ビームをビームスプリッタで分離して検出装置でそれぞれの画像を検出して1枚の画像に合成し、画像取得を高速に行うことを目的とする。【解決手段】複数ビーム生成装置、ビームスプリッタ、対物レンズ、偏向系、投影レンズ、ステージ、干渉計を備え、複数の1次電子ビームをビームスプリッタで対物レンズの軸に入射し、対物レンズでサンプルに細く絞った1次電子ビームを照射すると共に偏向系により走査する。サンプルから放出された2次電子をビームスプリッタで投影レンズの軸に入射させ、投影レンズで検出器に結像して複数電子ビームの画像を出力する。画像情報および干渉計から出力されたサンプルのリアルタイムの移動方向の位置、直角方向の位置をもとにステージの移動量、回転量の補正を行うように構成した。【選択図】図1 |
---|