POLISHING COMPOSITION AND MANUFACTURING METHOD FOR MAGNETIC DISK SUBSTRATE
To provide a polishing composition used for polishing Ni-P substrates capable of reducing scratches while maintaining practical workability.SOLUTION: A polishing composition used for polishing a Ni-P substrate is provided. This polishing composition contains colloidal silica, an acid, a defect reduc...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a polishing composition used for polishing Ni-P substrates capable of reducing scratches while maintaining practical workability.SOLUTION: A polishing composition used for polishing a Ni-P substrate is provided. This polishing composition contains colloidal silica, an acid, a defect reducing agent, and water. As the defect reducing agent, a heterocyclic aromatic chemical compound having an amino group is used.SELECTED DRAWING: None
【課題】Ni-P基板の研磨に用いられて、実用的な加工性を維持しながら、スクラッチを低減し得る研磨用組成物を提供する。【解決手段】Ni-P基板の研磨に用いられる研磨用組成物が提供される。この研磨用組成物は、コロイダルシリカと、酸と、欠陥低減剤と、水とを含む。上記欠陥低減剤としては、アミノ基を有する複素環芳香族化合物が用いられる。【選択図】なし |
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