CALIBRATION METHOD AND CALIBRATION SYSTEM
To provide a technology to save power for a light source of a calibration device for calibrating an emission spectrometric analysis device.SOLUTION: A calibration method includes a step for placing a calibration device in a chamber at a position higher than a mounting surface. The method includes a...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a technology to save power for a light source of a calibration device for calibrating an emission spectrometric analysis device.SOLUTION: A calibration method includes a step for placing a calibration device in a chamber at a position higher than a mounting surface. The method includes a step for emitting light from a light-emitting device of the calibration device in the chamber. The method includes a step for measuring intensity data of the light emitted from the light-emitting device by an emission spectrometric analysis device. The method includes a step for calibrating the emission spectrometric analysis device on the basis of the intensity data.SELECTED DRAWING: Figure 12
【課題】発光分光分析装置を校正するための校正装置の光源を省電力化する技術を提供する。【解決手段】例示的実施形態に係る校正方法は、チャンバ内において載置面よりも高い位置に校正装置を配置する工程を含む。該方法は、チャンバ内において校正装置の発光装置を発光させる工程を含む。該方法は、発光装置から発せられる光の強度データを発光分光分析装置によって計測する工程を含む。該方法は、強度データに基づいて発光分光分析装置を校正する工程を含む。【選択図】図１２ |
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