HEATING TREATMENT APPARATUS

To provide a heating treatment apparatus which can suppress the generation of particles even when each heater stretches in a direction along a central axis upon the ON/OFF time of the heater.SOLUTION: A heating treatment apparatus comprises: a chamber for storing a workpiece; bar-shaped plural heaters 33 which are provided inside the chamber; and either a first support part 34 or a second support part for supporting the heaters at the inside of the chamber. The plural heaters are lined up in a heater central axis cross direction, and the first support part comprises: a first plate 34a2 provided below the heaters; and a rolling part 34a provided between the heaters and the first plate, brought into contact with the heaters and the first plate and movable in the heater central axis direction. The second support part comprises: a holding part for holding the heaters; and a second plate which is connected to the holding part and is elastically deformable in the central axis direction of the heaters in response to the stretching of the heaters.SELECTED DRAWING: Figure 8 【課題】ヒータのＯＮ／ＯＦＦ時に、ヒータが中心軸に沿った方向に伸縮しても、パーティクル発生を抑制できる加熱処理装置を提供する。【解決手段】加熱処理装置は、ワークが収納されるチャンバと、チャンバ内に設けられる棒状の複数のヒータ３３と、チャンバ内にてヒータを支持する、第１の支持部３４、および第２の支持部のいずれかを備える。前記複数のヒータは、ヒータ中心軸交差方向に並び、前記第１の支持部は、前記ヒータの下方に設けられた第１のプレート３４ａ２と、前記ヒータと前記第１のプレートとの間に設けられ、前記ヒータと前記第１のプレートと接触し、前記ヒータ中心軸方向に移動可能な回動部３４ｂを有する。前記第２の支持部は、前記ヒータを保持する保持部と、前記保持部に接続され、前記ヒータの伸縮に応じ、前記ヒータの中心軸方向に弾性変形可能な第２のプレートと、を有する。【選択図】図８