SUBSTRATE CLAMP, SUBSTRATE CONVEYANCE TRAY, AND SUBSTRATE TRANSPORT DEVICE

To provide a substrate clamp which can reduce the size and the weight, and which has a small operation trouble risk, a substrate conveyance tray, and a substrate transport device.SOLUTION: A substrate clamp according to the present invention, comprises: a base body; a clamp mechanism; and an impact relaxation mechanism. The clamp mechanism includes: a first rotational member; a substrate gripping part that is fixed to the first rotational member; a first rotational shaft supported by the base body; and a first elastic body connecting the base body with the first rotational member. When an external force is applied, the first rotational member is rotated around the first rotational shaft to shift a close state to an open state, and the first elastic body is deformed to apply a reaction force to the first rotational member. The impact relaxation member includes: a second rotational member; a substrate contact part that is fixed to the second rotational member; a second rotational shaft supported by the base body; and a second elastic body connecting the base body with the second rotational member. When the substrate contact part is depressed from a side surface, the second rotational member is rotated around the second rotational shaft as well as deforming the second elastic body to apply the reaction force to the second rotational member.SELECTED DRAWING: Figure 7 【課題】小型軽量化が可能であり、動作不具合リスクが小さい基板クランプ、基板搬送トレイ及び基板搬送装置を提供すること【解決手段】本発明に係る基板クランプは、基体と、クランプ機構と、衝撃緩和機構とを具備する。クランプ機構は、第１回転部材と、第１回転部材に固定された基板把持部と、基体に支持された第１回転軸と、基体と第１回転部材を接続する第１弾性体とを有し、外力が印加されると第１回転部材が第１回転軸の周りに回転して閉状態から開状態に遷移すると共に第１弾性体が変形して第１回転部材に反力を印加する。衝撃緩和機構は、第２回転部材と、第２回転部材に固定された基板接触部と、基体に支持された第２回転軸と、基体と第２回転部材を接続する第２弾性体とを有し、基板接触部が側面から押圧されると第２回転部材が第２回転軸の周りに回転すると共に第２弾性体が変形して第２回転部材に反力を印加する。【選択図】図７