WORKPIECE INSPECTION METHOD AND INSPECTION DEVICE

To provide a workpiece inspection method and inspection device with which it is possible to determine a peeling layer formed in the inside of an ingot, without lowering productivity, and without being affected by saw marks.SOLUTION: The workpiece inspection method comprises: a peeling layer formatio...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: IGA YUTO
Format: Patent
Sprache:eng ; jpn
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!