INFORMATION PROCESSING DEVICE, MACHINE LEARNING DEVICE, INFORMATION PROCESSING METHOD, AND MACHINE LEARNING METHOD

To provide an information processing device that makes it possible to appropriately predict the influence of electromagnetic waves generated from an AC power line when substrate processing is performed.SOLUTION: An information processing device 5 includes: a current value information generation unit 501 that generates current value information of an alternating current supplied to AC equipment when substrate processing is performed by a substrate processing device that includes the AC equipment connected to an AC power source via an AC power line, and a control panel that controls the AC equipment to perform substrate processing of supplying processing fluid to the substrate or a processing member while bringing the processing member into contact with the substrate; and an electromagnetic wave influence information generation unit 502 that generates electromagnetic wave influence information indicating the influence of electromagnetic waves generated from AC power lines on the basis of the current value information generated by the current value information generation unit 501.SELECTED DRAWING: Figure 17 【課題】基板処理が行われたときに交流電力線から生じる電磁波の影響を適切に予測することを可能とする情報処理装置を提供する。【解決手段】情報処理装置５は、交流電源に交流電力線を介して接続された交流機器と、基板に処理部材を接触させつつ基板又は処理部材に処理流体を供給する基板処理を行うために交流機器を制御する制御盤とを備える基板処理装置により基板処理が行われたときに交流機器に供給される交流電流の電流値情報を生成する電流値情報生成部５０１と、電流値情報生成部５０１により生成された電流値情報に基づいて、交流電力線から生じる電磁波の影響を示す電磁波影響情報を生成する電磁波影響情報生成部５０２と、を備える。【選択図】 図１７