VACUUM CARBURIZATION METHOD AND VACUUM CARBURIZATION APPARATUS

To provide a vacuum carburization method and a vacuum carburization apparatus that, when applying vacuum carburization to an object to be processed which has an irregular shape at the surface thereof, reduce a surface hardness difference between irregularities.SOLUTION: A vacuum carburization method...

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Bibliographische Detailangaben
1. Verfasser:	SONOBE MASARU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	To provide a vacuum carburization method and a vacuum carburization apparatus that, when applying vacuum carburization to an object to be processed which has an irregular shape at the surface thereof, reduce a surface hardness difference between irregularities.SOLUTION: A vacuum carburization method includes: a first supply step of supplying a hydrocarbon gas into a carburization chamber in a carburization step; and a second supply step of further supplying a hydrocarbon gas during supply time that is set between a start point of a temperature-dropping step and an end point of a hardening and soaking step.SELECTED DRAWING: Figure 2 【課題】表面に凹凸形状を有する被処理物に対して真空浸炭を施す際、凹凸間の表面硬度差をより小さくする真空浸炭方法及び真空浸炭装置を提供する。【解決手段】真空浸炭方法は、浸炭工程において浸炭室内に炭化水素ガスを供給する第１供給工程と、降温工程の開始時点から焼入均熱工程の終了時点までの間に設定された供給時間中に炭化水素ガスをさらに供給する第２供給工程と、を含む。【選択図】図２