PIEZOELECTRIC ELEMENT
To provide a piezoelectric element with improved connection reliability.SOLUTION: In a piezoelectric element 10, third regions 62C, 63C, 64C are adjacent to first regions 62A, 63A, 64A and second regions 62B, 63B, 64B, and do not overlap with any of the first regions 62A, 63A, 64A and the second reg...
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| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a piezoelectric element with improved connection reliability.SOLUTION: In a piezoelectric element 10, third regions 62C, 63C, 64C are adjacent to first regions 62A, 63A, 64A and second regions 62B, 63B, 64B, and do not overlap with any of the first regions 62A, 63A, 64A and the second regions 62B, 63B, 64B viewed from the third direction D3. That is, in the piezoelectric element 10, protrusions are smoothed out to be nearly flat by the third regions 62C, 63C, and 64C, thereby achieving high connection reliability.SELECTED DRAWING: Figure 6
【課題】接続信頼性の向上が図られた圧電素子を提供する。【解決手段】 圧電素子１０においては、第三方向Ｄ３から見て、第３領域６２Ｃ、６３Ｃ、６４Ｃが、第１領域６２Ａ、６３Ａ、６４Ａおよび第２領域６２Ｂ、６３Ｂ、６４Ｂと隣り合っており、第１領域６２Ａ、６３Ａ、６４Ａおよび第２領域６２Ｂ、６３Ｂ、６４Ｂのいずれとも重畳していない。すなわち、圧電素子１０では、第３領域６２Ｃ、６３Ｃ、６４Ｃにより隆起が平らに近づくように均されており、それにより高い接続信頼性が実現されている。【選択図】図６ |
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