SAMPLE PIECE RELOCATING DEVICE

To provide a sample piece relocating device which can precisely execute a predetermined relocation operation and also can prevent breakage of a sample piece.SOLUTION: A sample piece relocation device (10) includes: a light interference measuring device (11), a sample piece carrying device (13), and...

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Bibliographische Detailangaben
1. Verfasser:	ASAHATA TATSUYA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	To provide a sample piece relocating device which can precisely execute a predetermined relocation operation and also can prevent breakage of a sample piece.SOLUTION: A sample piece relocation device (10) includes: a light interference measuring device (11), a sample piece carrying device (13), and a controller (21). The controller (21) controls the sample piece carrying device (13) on the basis of information on processing of fabricating a sample piece by radiating a charge particle beam on a sample (S) by a charge particle beam device. The sample piece carrying device (13) controlled by the controller (21) separates and extracts the sample piece from the sample (S), holds the sample piece, and carries the sample piece to the sample piece holder.SELECTED DRAWING: Figure 4 【課題】試料片の破損を防ぎつつ精度よく所定の移設動作を実行することが可能な試料片移設装置を提供する。【解決手段】試料片移設装置（１０）は、光干渉計測装置（１１）と、試料片搬送装置（１３）と、制御装置（２１）とを備える。制御装置（２１）は、荷電粒子ビーム装置によって荷電粒子ビームを試料（Ｓ）に照射することによって試料片を作製する加工に関する情報に基づき、試料片搬送装置（１３）を制御する。制御装置（２１）によって制御される試料片搬送装置（１３）は、試料片を試料（Ｓ）から分離及び摘出して、試料片を保持して試料片ホルダに搬送する。【選択図】図４