PBN HEATER FOR ALD TEMPERATURE UNIFORMITY

To provide a heater for a batch processing chamber.SOLUTION: A heater includes a body having a top and a bottom and including pyrolytic boron nitride (PBN), a first heater electrode, and a second heater electrode, and the heater electrodes can be encapsulated within electrically insulating standoffs...

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Bibliographische Detailangaben
Hauptverfasser:	KENNETH BRIAN DOERING, KEVIN GRIFFIN, KARTHIK RAMANATHAN, GREGORY J WILSON, MARIO D SILVETTI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	To provide a heater for a batch processing chamber.SOLUTION: A heater includes a body having a top and a bottom and including pyrolytic boron nitride (PBN), a first heater electrode, and a second heater electrode, and the heater electrodes can be encapsulated within electrically insulating standoffs and connected to separate busbars to provide power. There are also provided a heater assembly that includes one or more heaters, and a processing chamber that includes the heater assembly.SELECTED DRAWING: Figure 11 【課題】バッチ処理チャンバのためのヒータを提供する。【解決手段】頂部および底部を有し、熱分解窒化ホウ素（ＰＢＮ）を含む本体と、第１のヒータ電極と、第２のヒータ電極と、を有するヒータが記載される。ヒータ電極は、電気絶縁スタンドオフ内に封入され、別々のバスバーに接続されて電力を供給することができる。１つまたは複数のヒータを含むヒータアセンブリ、およびヒータアセンブリを含む処理チャンバも記載される。【選択図】図１１