LIGHT DELIVERY USING OPTICAL FIBER INTO VACUUM CHAMBER

To provide a laser-enhanced voltage contrast system using optical fibers.SOLUTION: A system includes a vacuum chamber with a stage that secures a wafer. Light is directed into an optical fiber from a laser source outside the vacuum chamber. The optical fiber transmits all wavelengths of light from t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MARTIN BRUTSCH, CHEN LI-MIN, DONALD PETTIBONE, EMANUEL SAERCHEN, OSCAR G FLORENDO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!