LIGHT DELIVERY USING OPTICAL FIBER INTO VACUUM CHAMBER

To provide a laser-enhanced voltage contrast system using optical fibers.SOLUTION: A system includes a vacuum chamber with a stage that secures a wafer. Light is directed into an optical fiber from a laser source outside the vacuum chamber. The optical fiber transmits all wavelengths of light from t...

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Bibliographische Detailangaben
Hauptverfasser:	MARTIN BRUTSCH, CHEN LI-MIN, DONALD PETTIBONE, EMANUEL SAERCHEN, OSCAR G FLORENDO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	To provide a laser-enhanced voltage contrast system using optical fibers.SOLUTION: A system includes a vacuum chamber with a stage that secures a wafer. Light is directed into an optical fiber from a laser source outside the vacuum chamber. The optical fiber transmits all wavelengths of light from the laser source through the walls of the vacuum chamber and into the vacuum chamber.SELECTED DRAWING: Figure 1 【課題】光ファイバを用いるレーザ強化電圧コントラストシステムを提供する。【解決手段】本システムは、ウェハを固持するステージ付の真空チャンバを有する。その真空チャンバ外のレーザ光源から光ファイバに光を差し向ける。その光ファイバにより、そのレーザ光源からの光の波長全てを、その真空チャンバの壁を通じその真空チャンバ内へと伝達する。【選択図】図１