AUTOMATIC PRESSURE CONTROL DEVICE, FILM FORMATION DEVICE AND PRESSURE CONTROL METHOD

To perform pressure control by facilitating gas replacement in an exhaust pipe and suppressing an influence of adhesion of a by-product.SOLUTION: An automatic pressure control device comprises a butterfly valve which has a valve body which is rotatably attached via a shaft to an annular valve seat w...

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Hauptverfasser: OKURA NARIYUKI, TAKEYAMA TAMAKI, TANIMURA TATSUHIKO, YONEKURA SOSHI
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To perform pressure control by facilitating gas replacement in an exhaust pipe and suppressing an influence of adhesion of a by-product.SOLUTION: An automatic pressure control device comprises a butterfly valve which has a valve body which is rotatably attached via a shaft to an annular valve seat whose inner wall surface forms a portion of an exhaust path and which changes an opening area of the exhaust path by being arranged in an inclined manner by changing an inclination angle with respect to a lateral cross section, and which controls a pressure in a processing container by changing the inclination angle of the valve body on the basis of a detection result of a pressure in the processing container. The valve body is configured such that a first tapered surface is formed in a region located on an end on a downstream side when being arranged in an inclined manner on the surface, a second tapered surface is formed in a region located on an end on an upstream side when being arranged in an inclined manner on a back surface, and an angle formed by a region excluding the first tapered surface of the surface and the first tapered surface and an angle formed by a region excluding the second tapered surface of the back surface and the second tapered surface are respectively greater than 95 degrees and equal to or less than 150 degrees.SELECTED DRAWING: Figure 5 【課題】排気管内でのガス置換を促進し、かつ副生成物の付着の影響を抑えて圧力制御を行うこと。【解決手段】内壁面が排気路の一部を形成する環状の弁座に対してシャフトを介して回動可能に取り付けられ、横断面に対する傾斜角を変化させて傾斜配置することで前記排気路の開口面積を変化させる弁体を有し、処理容器内の圧力の検出結果に基づいて前記弁体の傾斜角を変化させて前記処理容器内の圧力を制御するバタフライバルブを備え、前記弁体は、表面に傾斜配置の際に下流側の端部に位置する領域に第1テーパ面が形成され、裏面に傾斜配置の際に上流側の端部に位置する領域に第2テーパ面が形成され、前記表面の前記第1のテーパ面を除く領域と前記第1のテーパ面との成す角度と、前記裏面の前記第2のテーパ面を除く領域と前記第2のテーパ面との成す角度とは、それぞれ95度より大きく150度以下である。【選択図】図5