SEMICONDUCTOR DEVICE, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND ARRANGEMENT METHOD OF ALIGNMENT MARKS

To provide a semiconductor device which can more properly bond chips, a manufacturing method of the semiconductor device, and an arrangement method of alignment marks.SOLUTION: A semiconductor device according to the present embodiment includes a first chip and a second chip which is bonded to the f...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUSHIGE HIDEKI, YAMAMOTO SUSUMU, TOYODA GEN
Format: Patent
Sprache:eng ; jpn
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