SUBSTRATE PROCESSING DEVICE AND STORAGE METHOD FOR SUBSTRATE STORAGE CONTAINER

To store more substrate storage containers than before in a storage unit where substrate processing containers containing substrates are temporarily placed on standby.SOLUTION: A substrate processing device for processing a substrate has a substrate storage container placing unit for placing a subst...

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Bibliographische Detailangaben
Hauptverfasser:	TSUJIHASHI TATSUHIKO, IDE KOSEI, TERAMOTO AKIHIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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