SUBSTRATE PROCESSING DEVICE AND STORAGE METHOD FOR SUBSTRATE STORAGE CONTAINER

To store more substrate storage containers than before in a storage unit where substrate processing containers containing substrates are temporarily placed on standby.SOLUTION: A substrate processing device for processing a substrate has a substrate storage container placing unit for placing a substrate storage container that stores a substrate to be processed in the substrate processing device and a storage area arranged in proximity to the substrate storage container placing unit for storing the substrate storage container. The storage area has multiple storage sections for placing and storing a plurality of substrate storage containers in a horizontal direction, in multiple levels above and below the storage area. In other storage sections in the lower level located below the upper storage section in the storage area, a transfer device is further provided that places and stores the substrate storage containers in a different orientation from the substrate storage containers placed and stored in the upper storage section and has a mechanism that can transfer the substrate storage containers and change the horizontal orientation of the substrate storage containers while holding the substrate storage containers between the upper storage section and the other lower storage section.SELECTED DRAWING: Figure 2 【課題】基板を収納した基板処理容器を一時的に待機させる保管部に、従来よりも多くの基板収納容器を保管する。【解決手段】基板を処理する基板処理装置であって、前記基板処理装置において処理される基板を収納する基板収納容器を載置する基板収納容器載置部と、前記基板収納容器載置部に近接して配置され、前記基板収納容器を保管する保管領域と、を有し、前記保管領域は、複数の前記基板収納容器を水平方向に載置して保管する保管部を、上下多段に有し、前記保管領域における上側の保管部の下方に位置する下側の他の保管部には、前記上側の保管部に載置保管される基板収納容器とは、異なった向きで基板収納容器を載置して保管し、前記上側の保管部と、前記下側の他の保管部との間で、前記基板収納容器を移載可能であって、前記基板収納容器を保持した状態で水平方向に向きを変える機構を有する移載装置をさらに備える。【選択図】図２