IMAGE SENSOR
To provide an image sensor.SOLUTION: An image sensor includes a substrate having a first surface and a second surface that are opposite to each other in a first direction, a photoelectric conversion region in the substrate, an active region in the substrate on the photoelectric conversion region, an...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide an image sensor.SOLUTION: An image sensor includes a substrate having a first surface and a second surface that are opposite to each other in a first direction, a photoelectric conversion region in the substrate, an active region in the substrate on the photoelectric conversion region, an element separation pattern that extends from the first surface of the substrate into the substrate and defines the active region, and a transfer gate electrode including a first part penetrating the element separation pattern from the first surface of the substrate, and a second part disposed on the active region. The first part penetrates a lower surface of the element separation pattern and a lower surface of the first part is disposed below the lower surface of the element separation pattern.SELECTED DRAWING: Figure 6
【課題】イメージセンサが提供される。【解決手段】イメージセンサは、第1方向に互いに反対になる第1面および第2面を含む基板、基板内の光電変換領域、光電変換領域上の基板内の活性領域、基板の第1面から基板の内部に延びて活性領域を定義する素子分離パターン、および基板の第1面から素子分離パターンを貫通する第1部分と、活性領域上に配置された第2部分を含む転送ゲート電極を含み、第1部分は素子分離パターンの下面を貫通し、第1部分の下面は素子分離パターンの下面より下側に配置される。【選択図】図6 |
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