OSCILLATORY OPTICAL SENSOR, SPECTROSCOPE, FOOD ANALYSIS DEVICE, AND IMAGE DIAGNOSTIC DEVICE

To provide a small-sized oscillatory optical sensor which achieves an improved light absorption amount and photothermal conversion efficiency.SOLUTION: An oscillatory optical sensor 1 includes a micro-mechanical vibrator 10 and a substrate 30. The micro-mechanical vibrator 10 includes: a light reception part 200 which is provided at the substrate 30 in a non-contact manner and which has a rugged structure; and beams 21U, 21D, 22U, 22D for connecting the light reception part 200 and the substrate 30. The light reception part 200 includes a support layer 12 and a metal layer 11 laid on the support layer 12. One end of each of the beams 21U, 21D, 22U, 22D is connected to a different position on the support layer 12.SELECTED DRAWING: Figure 1 【課題】光吸収量および光熱変換効率が向上した小型の振動型光センサを提供する。【解決手段】振動型光センサ１は、微小機械振動子１０と、基体３０と、を備え、微小機械振動子１０は、基体３０と非接触で配置された、凹凸構造を有する受光部２００と、受光部２００と基体３０とを接続する梁２１Ｕ、２１Ｄ、２２Ｕおよび２２Ｄと、を備え、受光部２００は、支持層１２および支持層１２に積層された金属層１１を有し、梁２１Ｕ、２１Ｄ、２２Ｕおよび２２Ｄのそれぞれは、一端が支持層１２の異なる位置に接続されている。【選択図】図１