BOARD SUPPORT STRUCTURE AND SUBSTRATE PROCESSING APPARATUS

To provide a board support structure and a substrate processing apparatus, capable of preventing a dropout of a component.SOLUTION: A board support structure comprises: a substrate support member contacted to a substrate; a shaft member coupled to the substrate support member; and a plurality of sub...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YASUTOMO ATSUSHI, ITO TAKESHI, WAKABAYASHI TAKANORI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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