BOARD SUPPORT STRUCTURE AND SUBSTRATE PROCESSING APPARATUS

To provide a board support structure and a substrate processing apparatus, capable of preventing a dropout of a component.SOLUTION: A board support structure comprises: a substrate support member contacted to a substrate; a shaft member coupled to the substrate support member; and a plurality of substrate support pins. The substrate support member includes: a substrate contact surface contacted to the substrate; a head part having a first contact surface contacted to the shaft member; and an insertion part provided to the side of the first contact surface. The insertion part includes: a male screw part in which a male screw is formed on an outer peripheral surface; and a shaft part that is formed at a position near from the first contact surface from the male screw part, and of which a diameter is smaller than that of the male screw part. The shaft member includes: a second contact surface contacted to the first contact surface of the substrate support member; a penetration part in which a female screw that can be screwed to the male screw part to an inner peripheral surface is formed; and an inner space that is communicated with the penetration part, is formed at a position separated from the second contact surface from the penetration part, and of which an inner diameter is larger than that of the male screw part.SELECTED DRAWING: Figure 3 【課題】部品の脱落を防止する基板支持構造及び基板処理装置を提供する。【解決手段】基板と当接する基板支持部材と、前記基板支持部材と連結される軸部材と、を有する基板支持ピンを複数備える基板支持構造であって、前記基板支持部材は、前記基板と当接する基板当接面、及び、前記軸部材と当接する第１当接面を有する頭部と、前記第１当接面の側に設けられる挿入部と、を有し、前記挿入部は、外周面におねじが形成されたおねじ部と、前記おねじ部よりも前記第１当接面に近い位置に形成され、前記おねじ部よりも直径の小さい軸部と、を有し、前記軸部材は、前記基板支持部材の前記第１当接面と当接する第２当接面と、内周面に前記おねじ部と螺合可能なめねじが形成された貫通部と、前記貫通部と連通し、前記貫通部よりも前記第２当接面から離れた位置に形成され、前記おねじ部よりも内径の大きい内部空間と、を有する、基板支持構造。【選択図】図３