GAS FILTRATION DEVICE AND RETICLE CARRIER EQUIPPED WITH GAS FILTRATION DEVICE

To provide a gas filtration device and a reticle carrier equipped with a gas filtration device.SOLUTION: A gas filtration device according to the present invention that can be detachably attached to a reticle carrier includes at least one porous diffusion element, and a plurality of connections. The...

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Bibliographische Detailangaben
Hauptverfasser:	CHIU MINGIEN, HSUEH HSIN MIN, LIN SHU-HUNG, CHUANG CHIA HO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide a gas filtration device and a reticle carrier equipped with a gas filtration device.SOLUTION: A gas filtration device according to the present invention that can be detachably attached to a reticle carrier includes at least one porous diffusion element, and a plurality of connections. The porous diffusion element is removably connected to the reticle carrier via the plurality of connections, so that the porous diffusion element is restricted on the reticle carrier and provides a filtering function.SELECTED DRAWING: Figure 2D 【課題】気体ろ過装置及び気体ろ過装置を備えたレチクルキャリアを提供することを課題とする。【解決手段】本発明は、レチクルキャリアに着脱可能に取り付けられる気体ろ過装置を開示する。前記気体ろ過装置は、少なくとも１つの多孔質拡散要素と、複数の連結部とを含む。前記多孔質拡散要素は、前記複数の連結部を介してレチクルキャリアに着脱可能に連結されることで、前記多孔質拡散要素がレチクルキャリアに制限されてろ過機能を提供する。【選択図】図２Ｄ