STRAIN SENSOR
To provide a strain sensor having a configuration that makes it easy to detect strain in an object.SOLUTION: A strain sensor according to one embodiment of the present invention detects strain in a strain body and comprises: a package substrate; a base substrate that is disposed on the package subst...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a strain sensor having a configuration that makes it easy to detect strain in an object.SOLUTION: A strain sensor according to one embodiment of the present invention detects strain in a strain body and comprises: a package substrate; a base substrate that is disposed on the package substrate and includes an electrical wiring unit; a sensor substrate that is disposed on the base substrate and includes a plurality of piezoresistive elements; and a mold resin that covers the base substrate and sensor substrate on the package substrate. The surface of the sensor substrate protrudes further than the surface of the mold resin, and the surfaces of the mold resin and sensor substrate are the surfaces that are attached to the strain body.SELECTED DRAWING: Figure 1
【課題】対象物の歪みを検知しやすい構成の歪みセンサを提供すること。【解決手段】本発明の一態様は、起歪体の歪みを検知する歪みセンサであって、パッケージ基板と、パッケージ基板の上に配置され、電気配線部を有するベース基板と、ベース基板の上に配置され、複数のピエゾ抵抗素子を有するセンサ基板と、パッケージ基板上のベース基板およびセンサ基板を覆うモールド樹脂と、を備え、センサ基板の表面がモール樹脂の表面よりも突出し、モール樹脂の表面およびセンサ基板の表面が起歪体との取り付け面となる、ことを特徴とする歪みセンサである。【選択図】図1 |
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