END FACE POSITION CONFIRMATION METHOD OF GLASS SUBSTRATE
To provide an end face position confirmation method of a glass substrate that confirms a position of an end face of a notch in a disk-shaped glass substrate that is positioned with the notch in contact with a positioning pin, and can accurately confirm the position of the end face of the notch even...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide an end face position confirmation method of a glass substrate that confirms a position of an end face of a notch in a disk-shaped glass substrate that is positioned with the notch in contact with a positioning pin, and can accurately confirm the position of the end face of the notch even when a pair of corners facing each other in a thickness direction of the glass substrate in the notch are chamfered.SOLUTION: A notch Ga is illuminated by an illumination device 30 located above a glass substrate G and on the center side of the glass substrate G with respect to a positioning pin 20, and the notch Ga is imaged by an imaging device 40 located directly above the notch Ga.SELECTED DRAWING: Figure 1
【課題】位置決めピンに切欠き部を当接させた状態で位置決めされた円盤形状のガラス基板において、当該切欠き部の端面の位置を確認するガラス基板の端面位置確認方法であって、切欠き部における、ガラス基板の厚み方向に対向する一対の角部に面取り加工が施されている場合であっても、切欠き部の端面の位置を正確に確認することができるガラス基板の端面位置確認方法を提供する。【解決手段】ガラス基板Ｇの上方、且つ位置決めピン２０に対してガラス基板Ｇの中心側に位置する照明装置３０によって切欠き部Ｇａを照明するとともに、切欠き部Ｇａの直上に位置する撮像装置４０によって、切欠き部Ｇａを撮像する。【選択図】図１ |
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