PALLADIUM COBALT OXIDE TARGET, DELAFOSSITE-TYPE OXIDE TARGET, AND METHOD FOR PRODUCING PALLADIUM COBALT OXIDE TARGET

To provide a palladium cobalt oxide target, a delafossite-type oxide target, and a method for producing the palladium cobalt oxide target.SOLUTION: A palladium cobalt oxide target has a denseness calculated based on the density of palladium cobalt oxide (PdCoO2) of 60% or more and 80% or less, and a...

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Hauptverfasser:	NUMAZAKI TAKESHI, MASAHIRO YASUSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	To provide a palladium cobalt oxide target, a delafossite-type oxide target, and a method for producing the palladium cobalt oxide target.SOLUTION: A palladium cobalt oxide target has a denseness calculated based on the density of palladium cobalt oxide (PdCoO2) of 60% or more and 80% or less, and a concentration of palladium cobalt oxide on a surface of 90.0 mass% or more and 99.5 mass% or less.SELECTED DRAWING: None 【課題】パラジウムコバルト酸化物ターゲット、デラフォサイト型酸化物ターゲット及びパラジウムコバルト酸化物ターゲットの製造方法を提供する。【解決手段】パラジウムコバルト酸化物ターゲットは、パラジウムコバルト酸化物（ＰｄＣｏＯ２）の密度に基づいて算出した緻密度が６０％以上８０％以下で、表面のパラジウムコバルト酸化物の濃度が９０.０質量％以上９９．５質量％以下である。【選択図】無し